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high-pure argon
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O2 ≤1ppm N2 ≤5ppm H2 ≤1ppm H20 ≤4ppm total carbon content ≤2ppm ssss
pure argon
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O2≤10ppm N2≤50ppm H2≤5ppmssss
liquid argon
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O2≤4ppm N2≤15ppm H2≤2ppmssss
high-pure helium
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Ne ≤4vpm H2 ≤1vpm O2+Ar ≤1vpm ssss
pure helium
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Ne≤15vpm H2≤3vpm O2+Ar≤3vpmssss
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