Details for Hexafluoroethane
Hexafluoroethane
111Category: Organic chemicals and Derivatives
CAS NO: 76-16-4 EC NO: 200-939-8 Molecular Formula: C2F6 Molecular Weight: 138.0118 Specification: InChI: InChI=1/C2F6/c3-1(4,5)2(6,7)8 Product description:
Hexafluoroethane is a colorless, odorless gas.Refrigerant. Etchant in semiconductor manufacturing. It can be used for selective etching of metal silicides and oxides versus their metal substrates and also for etching of silicon dioxide over silicon.Synonyms: FC-116;Perfluoroethane;R116; Molecular Structure: 
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