IGX Group, Inc.

Hexafluoroethane

• Category :

  Organic chemicals and Derivatives

• Synonyms :

  FC-116;Perfluoroethane;R116;

• CAS NO :

  76-16-4

• EC NO :

  200-939-8

• Molecular Formula :

  C₂F₆

• Molecular Weight :

  138.0118

• Main Specifications :

• InChI :

  InChI=1/C2F6/c3-1(4,5)2(6,7)8

• Product description :

  Hexafluoroethane is a colorless, odorless gas.Refrigerant. Etchant in semiconductor manufacturing. It can be used for selective etching of metal silicides and oxides versus their metal substrates and also for etching of silicon dioxide over silicon.

• Molecular Structure :