NF3/Nitrogen Trifluoride/Nitrogen Fluoride
Inquiry
| Post Date: | Apr 10,2017 |
| Expiry Date: | Oct 07,2017 |
| Detailed Description: |
Cas No. :7783-54-2
Quantity: 20Metric Tons Specs:99.995% Price:60 USD Metric Tons Payment Method: t/t Basic Information Product name: Nitrogen Trifluoride; Nitrogen Fluoride CAS No.: 7783-54-2 M.F: NF3 M.S Physical characteristic Molecular weight Melting point Boiling point Critical temperature Critical pressure 71.01 -206.8℃(1atm) -129℃(1atm) -39.3℃ 44.02atm(4.46MPa) Liquid density Gas density Solubility in water the normality of Danger classification 1554kg/m3(1atmat the boiling point) 2.95kg/m3(1atm 21℃) 1.43*10-5(1atm，22℃) the 2.3-grade toxic gas. The maximum allowance content in air is 29mg/m3 Quality standard ( Q/718J58-2013 ) Impurities NF3≥99.995% Vol.% NF3≥99.99% Vol.% NF3≥99.98% Vol.% NF3≥99.9% Vol.% CF4 ≤20 Vol.ppm ≤40 Vol.ppm ≤100 Vol.ppm ≤500 Vol.ppm N2 ≤5 Vol.ppm ≤5 Vol.ppm ≤10 Vol.ppm ≤50 Vol.ppm O2+Ar ≤3 Vol.ppm ≤5 Vol.ppm ≤10 Vol.ppm ≤50 Vol.ppm CO2 ≤1 Vol.ppm ≤5 Vol.ppm ≤10 Vol.ppm ≤10 Vol.ppm H2O ≤1 Vol.ppm ≤1 Vol.ppm ≤1 Vol.ppm ≤1 Vol.ppm HF ≤1 Vol.ppm ≤1 Vol.ppm ≤1 Vol.ppm ≤1 Vol.ppm SF6 ≤1 Vol.ppm ≤2 Vol.ppm ≤2 Vol.ppm ≤25 Vol.ppm N2O ≤1 Vol.ppm ≤5 Vol.ppm ≤10 Vol.ppm ≤10 Vol.ppm CO ≤0.5 Vol.ppm ≤5 Vol.ppm ≤10 Vol.ppm ≤10 Vol.ppm Package Cylinder(47L), Bundle(16×47L), Bundle(25×47L), Y-Cylinder(470L), ISO etc. The steel cylinder capacity The steel cylinder type Valves Cylinder pressure Gas mass Danger No. UN Code Package classification Package symbol 47L,43.3L,40L,8L DOT-3AA,GB5099 CGA330, CGA640 9.0-13.0MPa 22kg,20kg 3.4kg 23016 2451 Ⅱ 6 Usage NF3 is a kind of excellent plasma etching gas which is used in microelectronics industry. During etching Si and SiN the pollution is free. NF3 is good at etching rate and selectivity, and it is a good cleaning agent. |
| CAS Registry Number: | 7783-54-2 |
| Synonyms: | ;232-007-1;trifluoroamine; |
| Molecular Formula: | F3N |
| Molecular Weight: | 71.0019 |
| Molecular Structure: | 
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| Company: | Zibo Eyuan Import and Export Co Ltd [ China ] |
| Contact: | Kevin Cui |
| Tel: | +86-533-6288980 |
| Fax: | +86-533-5207817 |
| Email: | cui@eyuantrading.com |
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