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Sulfur Hexafluoride

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  Post Date: Mar 25,2017
  Expiry Date: Mar 25,2018
  Detailed Description: Cas No. :2551-62-4 Sulfur Hexafluoride

Description
Sulfur Hexafluoride,SF6 is a colorless, nonflammable, liquefied, compressed gas

Gas Data
Molecular Weight 146.05
Specific Gravity(Air=1) 5.1

Applications
Fluorine source for high density plasma etching: offers high selectivity without generating
carbon by-products.
Specifications

SF6
Property Unit Minimum Maximum
SF6 %vol 99.999 --
O2 ppmv -- 1
N2 ppmv -- 2
CO ppmv -- 0.1
CO2 ppmv -- 0.1
CF4 ppmv -- 0.5
H2O ppmv -- 2
HF ppmv -- 0.1
THC(CH4) ppmv -- 0.1
Package
Cylinder Size DOT3AA 2265-47L/DOT3AA 2265-43L
Valve CGA 580 / 590
This is common cylinders sizes.RUIHUA fills customer owned cylinders.

Shipping Information
DOT Label Green, Nonflammable Gas
DOT Class 2.2
CAS No.: 2551-62-4
UN Number 1080

  CAS Registry Number:

2551-62-4

  Synonyms: ;sulfur hexafluoride cyl. with 4.75 kg (~net);Sulfur hexafluoride;Sulphurhexafluoride2;hexafluoro-lambda~6~-sulfane;sulfur(+2) dihydride cation difluoride;
  Molecular Formula: H4F2S
  Molecular Weight: 74.0936
  Molecular Structure: 2551-62-4 Sulphur hexafluoride

  Company: Shandong Ruihua Fluoride Industry Co., Ltd         
  Contact: Julia Ge
  Tel: 0530-6233885
  Fax: -
  Email: juliage@rhfuye.com
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