Sulfur Hexafluoride
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Post Date: | Mar 25,2017 |
Expiry Date: | Mar 25,2018 |
Detailed Description: |
Cas No. :2551-62-4
Sulfur Hexafluoride
Description Sulfur Hexafluoride,SF6 is a colorless, nonflammable, liquefied, compressed gas Gas Data Molecular Weight 146.05 Specific Gravity(Air=1) 5.1 Applications Fluorine source for high density plasma etching: offers high selectivity without generating carbon by-products. Specifications SF6 Property Unit Minimum Maximum SF6 %vol 99.999 -- O2 ppmv -- 1 N2 ppmv -- 2 CO ppmv -- 0.1 CO2 ppmv -- 0.1 CF4 ppmv -- 0.5 H2O ppmv -- 2 HF ppmv -- 0.1 THC(CH4) ppmv -- 0.1 Package Cylinder Size DOT3AA 2265-47L/DOT3AA 2265-43L Valve CGA 580 / 590 This is common cylinders sizes.RUIHUA fills customer owned cylinders. Shipping Information DOT Label Green, Nonflammable Gas DOT Class 2.2 CAS No.: 2551-62-4 UN Number 1080 |
CAS Registry Number: | 2551-62-4 |
Synonyms: | ;sulfur hexafluoride cyl. with 4.75 kg (~net);Sulfur hexafluoride;Sulphurhexafluoride2;hexafluoro-lambda~6~-sulfane;sulfur(+2) dihydride cation difluoride; |
Molecular Formula: | H4F2S |
Molecular Weight: | 74.0936 |
Molecular Structure: |
Company: | Shandong Ruihua Fluoride Industry Co., Ltd |
Contact: | Julia Ge |
Tel: | 0530-6233885 |
Fax: | - |
Email: | juliage@rhfuye.com |
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