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halocarbon14

Inquiry
  Post Date: Mar 25,2017
  Expiry Date: Mar 25,2018
  Detailed Description: Cas No. :75-73-0 Halocarbon 14

Description
Halocarbon 14, CF4, (tetrafluoromethane) is a colorless, nonflammable, high-pressure gas.

Gas Data
Molecular Weight 88
Specific Gravity(Air=1) 3.04

Applications
With added oxygen, CF4 (usually >80% mixture concentration) is used for plasma etching of
polysilicon, silicon dioxide, silicon nitride, refractory metals and metal silicides. Etching and
stripping of photoresists and other polymers are also major uses of CF4 (usually <20%) and
oxygen mixtures.

Specifications

CF4
Property Unit Minimum Maximum
CF4 %vol 99.999 --
O2 ppmv -- 1
N2 ppmv -- 4
CO ppmv -- 0.3
CO2 ppmv -- 0.5
SF6 ppmv -- 0.2
H2O ppmv -- 0.5
HF ppmw -- 0.1
TFC(C2F6/CH2F2/CHF3/C3F8) ppmv -- 1
Package
Cylinder Size DOT3AA 2265-47L/DOT3AA 2265-43L
Valve CGA 580 Brass/ 590 Brass/ 320 Brass /DISS716
This is common cylinders sizes.RUIHUA fills customer owned cylinders.

Shipping Information
DOT Label Green, Nonflammable Gas
DOT Class 2.2
CAS No.: 75-73-0
UN Number 1982

  CAS Registry Number:

75-73-0

  Synonyms: ;Tetrafluoromethane;
  Molecular Formula: CF4
  Molecular Weight: 88
  Molecular Structure: 75-73-0 carbon tetrafluoride
  Safety Description: S38:;

  Company: Shandong Ruihua Fluoride Industry Co.,Ltd.         
  Contact: Julia Ge
  Tel: 0530-6233885
  Fax: -
  Email: juliage@rhfuye.com
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