Carbon tetrafluoride
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Post Date:
Sep 28,2017
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Expiry Date:
Sep 28,2018
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Detailed Description:
Cas No. :75-73-0
Specs:99.999%, 99.995%, 99.99%
Product name: Carbon tetrafluoride
Other name: Tetrafluoromethane, Freon 14
CAS: 75-73-0
Molecular formula: CF4
Physical Appearance
Melting point -183.6 ℃
Boiling point -128.1 ℃
Liquid density (-130 ℃)1.613g/cm3
Critical temperature -45.67 ℃
Critical pressure 3.73MPa
Critical density 7.1dm3/mol
At room temperature, carbon tetrafluoride is a colorless, odorless compressed gas. It has high stability, and is inflammable. At 900℃, it has no reaction with coppernickel, tungsten, or molybdenum. It does not react with water.
Use
CF4 can be widely used in etching of silicon, SiO2, SiN4, phosphorus silicon glass and tungsten film material, and also can be used in the electronic components surface cleaning and solar battery production, laser technology, space technology, metal smelting, meteorological insulation, low temperature refrigeration etc many aspects.
CF4 Quality standard
Item Index
CF4, % (V/V) ≥ 99.999 99.995 99.99
N2, 10-6(V/V) ≤ 4 20 40
O2, 10-6(V/V) ≤ 1 5 10
CO2, 10-6 (V/V) ≤ 1 5 10
CO, 10-6 (V/V) ≤ 0.3 0.5 1
SF6, 10-6 (V/V) ≤ 1 1 5
H2O, 10-6 (V/V) ≤ 1 5 10
HF, 10-6 (V/V) ≤ 0.1 0.3 0.3
TFC(CH2F2, CHF3, C2F3, C3F8), 10-6 (V/V) ≤ 1 10 30
Total impurities content ppm (V/V) ≤ 10 50 100
Packing: seamless steel gas cylinders.
Cylinder standard DOT/48.8L DOT/47L 40L 10L 4L
Valve model CGA580(positive screw)CGA590(reverse screw)CGA320 DISS716
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CAS Registry Number:
75-73-0
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Synonyms:
;Tetrafluoromethane;
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Molecular Formula:
CF4
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Molecular Weight:
88
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Molecular Structure:
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Safety Description:
S38:;
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Company:
Wuxi Tianzhi Chemical Technology Co., Ltd
[ China ]
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Contact:
Li Gang
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Tel:
0510-82446262
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Fax:
0510-82445262
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Email:
wxtzkj@126.com
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