NF3/Nitrogen Trifluoride/Nitrogen Fluoride

• Post Date:

  Apr 10,2017

• Expiry Date:

  Oct 07,2017

• Detailed Description:

  Cas No. :7783-54-2 Quantity: 20Metric Tons
  Specs:99.995%
  Price:60 USD Metric Tons
  Payment Method: t/t
  Basic Information
  Product name: Nitrogen Trifluoride; Nitrogen Fluoride
  CAS No.: 7783-54-2 M.F: NF3 M.S
  Physical characteristic
  Molecular weight Melting point Boiling point Critical temperature Critical pressure
  71.01 -206.8℃(1atm) -129℃(1atm) -39.3℃ 44.02atm(4.46MPa)
  
  Liquid density Gas density Solubility in water the normality of Danger classification
  1554kg/m3(1atmat the boiling point) 2.95kg/m3(1atm 21℃) 1.43*10-5(1atm，22℃) the 2.3-grade toxic gas. The maximum allowance content in air is 29mg/m3
  
  Quality standard ( Q/718J58-2013 )
  Impurities NF3≥99.995% Vol.% NF3≥99.99% Vol.% NF3≥99.98% Vol.% NF3≥99.9% Vol.%
  CF4 ≤20 Vol.ppm ≤40 Vol.ppm ≤100 Vol.ppm ≤500 Vol.ppm
  N2 ≤5 Vol.ppm ≤5 Vol.ppm ≤10 Vol.ppm ≤50 Vol.ppm
  O2+Ar ≤3 Vol.ppm ≤5 Vol.ppm ≤10 Vol.ppm ≤50 Vol.ppm
  CO2 ≤1 Vol.ppm ≤5 Vol.ppm ≤10 Vol.ppm ≤10 Vol.ppm
  H2O ≤1 Vol.ppm ≤1 Vol.ppm ≤1 Vol.ppm ≤1 Vol.ppm
  HF ≤1 Vol.ppm ≤1 Vol.ppm ≤1 Vol.ppm ≤1 Vol.ppm
  SF6 ≤1 Vol.ppm ≤2 Vol.ppm ≤2 Vol.ppm ≤25 Vol.ppm
  N2O ≤1 Vol.ppm ≤5 Vol.ppm ≤10 Vol.ppm ≤10 Vol.ppm
  CO ≤0.5 Vol.ppm ≤5 Vol.ppm ≤10 Vol.ppm ≤10 Vol.ppm
  
  Package
  Cylinder(47L), Bundle(16×47L), Bundle(25×47L), Y-Cylinder(470L), ISO etc.
  The steel cylinder
  capacity The steel
  cylinder type Valves Cylinder
  pressure Gas mass Danger No. UN Code Package
  classification Package symbol
  47L,43.3L,40L,8L DOT-3AA,GB5099 CGA330, CGA640 9.0-13.0MPa 22kg,20kg
  3.4kg 23016 2451 Ⅱ 6
  Usage
  NF3 is a kind of excellent plasma etching gas which is used in microelectronics industry. During etching Si and SiN the pollution is free. NF3 is good at etching rate and selectivity, and it is a good cleaning agent.
  

• CAS Registry Number:

  7783-54-2

• Synonyms:

  ;232-007-1;trifluoroamine;

• Molecular Formula:

  F₃N

• Molecular Weight:

  71.0019

• Molecular Structure:

  

• Company:

  Zibo Eyuan Import and Export Co Ltd     [ China ]        

• Contact:

  Kevin Cui

• Tel:

  +86-533-6288980

• Fax:

  +86-533-5207817

• Email:

  cui@eyuantrading.com