Sulfur Hexafluoride
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Post Date:
Mar 25,2017
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Expiry Date:
Mar 25,2018
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Detailed Description:
Cas No. :2551-62-4
Sulfur Hexafluoride
Description
Sulfur Hexafluoride,SF6 is a colorless, nonflammable, liquefied, compressed gas
Gas Data
Molecular Weight 146.05
Specific Gravity(Air=1) 5.1
Applications
Fluorine source for high density plasma etching: offers high selectivity without generating
carbon by-products.
Specifications
SF6
Property Unit Minimum Maximum
SF6 %vol 99.999 --
O2 ppmv -- 1
N2 ppmv -- 2
CO ppmv -- 0.1
CO2 ppmv -- 0.1
CF4 ppmv -- 0.5
H2O ppmv -- 2
HF ppmv -- 0.1
THC(CH4) ppmv -- 0.1
Package
Cylinder Size DOT3AA 2265-47L/DOT3AA 2265-43L
Valve CGA 580 / 590
This is common cylinders sizes.RUIHUA fills customer owned cylinders.
Shipping Information
DOT Label Green, Nonflammable Gas
DOT Class 2.2
CAS No.: 2551-62-4
UN Number 1080
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CAS Registry Number:
2551-62-4
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Synonyms:
;sulfur hexafluoride cyl. with 4.75 kg (~net);Sulfur hexafluoride;Sulphurhexafluoride2;hexafluoro-lambda~6~-sulfane;sulfur(+2) dihydride cation difluoride;
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Molecular Formula:
H4F2S
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Molecular Weight:
74.0936
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Molecular Structure:
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Company:
Shandong Ruihua Fluoride Industry Co., Ltd
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Contact:
Julia Ge
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Tel:
0530-6233885
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Fax:
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Email:
juliage@rhfuye.com
Inquiry