Commodity: Trichlorosilane(TCS)
Appearance: Transparent liquid without suspension and sediments.
Molecular Formula: SiHCl3
Application: Used to compose the organosilane,alkyl and chlorosilane. It is the basic monomer in silane coupling agent,and the material of the semiconductor silicon and polysilicon.
Package & Storage:The bulk product should be transported by tank- truck.During the transportation,should avoid impacting, and also avoid solarization,rain,high temperature and away from fire source ,heat source.
Safety Protection: Operators should wear chemical gloves,gas masks and safety goggles.
Items |
Index |
|
First Class |
Qualified |
|
Appearance |
Colorless Transparent volatile Liquid |
|
The content of Trichlorosilane % ≥ |
99.5 |
98.0 |
The content of Dichlorosilane % ≤ |
0.20 |
0.50 |
The content of tetrachlorosilane % ≤ |
0.25 |
0.70 |
The content of Chlorine silane polymer,% ≤ |
0.05 |
0.30 |
The content of boron % ≤ |
0.00001 |
0.00005 |