halocarbon14

• Post Date:

  Mar 25,2017

• Expiry Date:

  Mar 25,2018

• Detailed Description:

  Cas No. :75-73-0 Halocarbon 14
  
  Description
  Halocarbon 14, CF4, (tetrafluoromethane) is a colorless, nonflammable, high-pressure gas.
  
  Gas Data
  Molecular Weight 88
  Specific Gravity(Air=1) 3.04
  
  Applications
  With added oxygen, CF4 (usually >80% mixture concentration) is used for plasma etching of
  polysilicon, silicon dioxide, silicon nitride, refractory metals and metal silicides. Etching and
  stripping of photoresists and other polymers are also major uses of CF4 (usually <20%) and
  oxygen mixtures.
  
  Specifications
  
  CF4
  Property Unit Minimum Maximum
  CF4 %vol 99.999 --
  O2 ppmv -- 1
  N2 ppmv -- 4
  CO ppmv -- 0.3
  CO2 ppmv -- 0.5
  SF6 ppmv -- 0.2
  H2O ppmv -- 0.5
  HF ppmw -- 0.1
  TFC(C2F6/CH2F2/CHF3/C3F8) ppmv -- 1
  Package
  Cylinder Size DOT3AA 2265-47L/DOT3AA 2265-43L
  Valve CGA 580 Brass/ 590 Brass/ 320 Brass /DISS716
  This is common cylinders sizes.RUIHUA fills customer owned cylinders.
  
  Shipping Information
  DOT Label Green, Nonflammable Gas
  DOT Class 2.2
  CAS No.: 75-73-0
  UN Number 1982

• CAS Registry Number:

  75-73-0

• Synonyms:

  ;Tetrafluoromethane;

• Molecular Formula:

  CF₄

• Molecular Weight:

  88

• Molecular Structure:

  

• Safety Description:

  S38:;
  

• Company:

  Shandong Ruihua Fluoride Industry Co.,Ltd.         

• Contact:

  Julia Ge

• Tel:

  0530-6233885

• Fax:

  -

• Email:

  juliage@rhfuye.com