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sulfur hexafluoride

Inquiry
  Post Date: Apr 03,2023
  Expiry Date: Apr 02,2024
  Detailed Description: Cas No. :2551-62-4 Quantity: 3000Metric Tons
Specs:99.9%-99.999%
Description
Sulfur Hexafluoride,SF6 is a colorless, nonflammable, liquefied, compressed gas
Gas Data
Molecular Weight 146.05
Specific Gravity(Air=1) 5.1

Applications
Fluorine source for high density plasma etching: offers high selectivity without generating
carbon by-products.
Specifications

SF6
Property Unit Minimum Maximum
SF6 %vol 99.999 --
O2 ppmv -- 1
N2 ppmv -- 3
CO ppmv -- 0.5
CO2 ppmv -- 1
CF4 ppmv -- 2
H2O ppmv -- 2
HF ppmv -- 0.1
THC(CH4) ppmv -- 1


Package
Cylinder Size DOT3AA 2265-47L/DOT3AA 2265-43L
Valve CGA 580 / 590
This is common cylinders sizes.RUIHUA fills customer owned cylinders.

Shipping Information
DOT Label Green, Nonflammable Gas
DOT Class 2.2
CAS No.: 2551-62-4
UN Number 1080

  CAS Registry Number:

2551-62-4

  Synonyms: ;sulfur hexafluoride cyl. with 4.75 kg (~net);Sulfur hexafluoride;Sulphurhexafluoride2;hexafluoro-lambda~6~-sulfane;sulfur(+2) dihydride cation difluoride;
  Molecular Formula: H4F2S
  Molecular Weight: 74.0936
  Molecular Structure: 2551-62-4 Sulphur hexafluoride

  Company: Shandong Ruihua Fluoride Industry Co.,Ltd     [ China ]        
  Contact: Julia Ge
  Tel: 0530-6233885
  Fax: 0530-6233828
  Email: ruihuafluoride@rhfuye.com
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