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SILICON TETRAFLUORIDE
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CAS NO:7783-61-1; MF:F
4
Si
SULFUR HEXAFLUORIDE
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CAS NO:2551-62-4; MF:H
4
F
2
S
TRICHLOROSILANE
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CAS NO:10025-78-2; MF:Cl
3
Si
TUNGSTEN HEXAFLUORIDE
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CAS NO:7783-82-6; MF:F
6
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