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Silane
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CAS NO:7803-62-5; MF:SiH
4
Silcore
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Dichlorosilane
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CAS NO:4109-96-0; MF:Cl
2
Si
Silicon Tetrafluoride
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CAS NO:7783-61-1; MF:F
4
Si
Methane
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CAS NO:74-82-8; MF:CH
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Deuterium
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CAS NO:7782-39-0; MF:D
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Deuterated Ammonia
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Deuterated Diborane
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Deuterated Germane
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Deuterated Silane
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Deuterated Trimethylboron
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Argon
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CAS NO:7440-37-1; MF:Ar
Helium
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CAS NO:71086-78-7;7440-59-7; MF:He
Hydrogen
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CAS NO:1333-74-0; MF:
1
H
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Nitrogen
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CAS NO:7727-37-9; MF:N
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